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SiSiC Cantilevers Paddles

SiSiC (RBSC) cantilever paddles are key components in semiconductor wafer loading systems.

SiSiC Cantilever Paddles deliver stable performance and do not deform at high temperatures. They provide a high wafer-loading capacity and are suitable for robotic, automated loading and handling systems.

Due to the stable cross-section and excellent deformation resistance of Cantilever Paddles, it becomes possible to process larger-diameter wafers using existing furnace tubes.

The thermal expansion coefficient of Cantilever Paddles is close to that of LPCVD coatings, making them highly suitable for LPCVD processes. This significantly extends the maintenance and cleaning cycle and greatly reduces contamination.

ITEM	单位	反应烧结碳化硅 RBSiC(SiSiC)	常压烧结碳化硅 SSiC
ITEM	UNIT	DATA	DATA
最高使用温度 Max Temperature of Application	℃	1380	1600
密度 Density	g/cm³	>3.02	>3.1
气孔率 Open Porosity	%	<0.1	<0.1
抗弯强度 Bending Strength	Mpa	250(20℃)	>400
抗弯强度 Bending Strength	MPa	280(1200℃)
弹性模量 Modulus of Elasticity	Gpa	330(20℃)	420
弹性模量 Modulus of Elasticity	GPa	300(1200℃)
传导系数 Thermal Conductivity	W/m.k	45(1200℃)	74
热膨胀系数 Coefficient of Thermal Expansion	K¹×10⁶	4.5	4.1
维氏硬度 Vickers Hardness HV₁	Gpa	20	22
耐酸碱性 Acid-alkaline-proof		Excellent	Excellent

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